Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography (Data)
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Raw data and figures used for the article "Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography", published in <em>Sensors</em> <strong>2023</strong>, <em>23</em>(4), 2003.
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Zenodo创建时间：
2023-02-10
