Probing the crystalline phase differences between pristine and electrically-cycled HZO films in ferroelectric tunnel junctions

We want to use scanning diffraction to map the distribution of crystalline phases (non-ferroelectric monoclinic and ferroelectric orthorhombic) in 10 nm Hf0.5Zr0.5O2 thin films integrated in ferroelectric tunnel junctions and investigate how they change upon electrical cycling. The eventual variation of crystal structure in the films upon wake-up electrical cycling and after longer time operation will be investigated by comparing measurements of samples in the pristine state and after ex-situ electrical cycling.