Dataset of Thin Film Lithium Niobate Electro-optic Isolator Fabricated by photolithography assisted chemo-mechanical etching (PLACE)

Name: Dataset of Thin Film Lithium Niobate Electro-optic Isolator Fabricated by photolithography assisted chemo-mechanical etching (PLACE)
Creator: Shanghai Institute of Optics and Fine Mechanics
Published: 2024-11-06T00:00:00+08:00

科学数据银行2024-11-18 更新2026-04-23 收录

集成光子器件制造

微纳加工工艺

数据链接：

https://www.scidb.cn/detail?dataSetId=26c4161b6fe14e53ae0f7781535c9eca 数据链接链接失效反馈

官方服务：

资源简介：

The dataset collects the necessary data from the article "Thin Film Lithium Niobate Electro-optic Isolator Fabricated by Photolithography Assisted Chemo-Mechanical Etching (PLACE)"

提供机构：

Shanghai Institute of Optics and Fine Mechanics

创建时间：

2024-11-06