The data of deposition rates for pulse sputtering conditions
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https://figshare.com/articles/dataset/The_data_of_deposition_rates_for_pulse_sputtering_conditions/29834834
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资源简介：
The table contains process parameters data for operating a gas aggregation nanoparticle source. The data include the aggregation chamber pressure, the mean power delivered to the magnetron, the frequency and pulse length of a discharge, and the obtained deposition rate of nanoparticles.
创建时间：
2025-08-06
