Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit
收藏DataCite Commons2025-07-02 更新2025-09-08 收录
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https://springernature.figshare.com/articles/dataset/Transfer_printing_micro-assembly_of_silicon_photonic_crystal_cavity_arrays_beating_the_fabrication_tolerance_limit/28280786
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资源简介：
Source data for "Transfer printing micro-assembly of silicon
photonic crystal cavity arrays: beating the fabrication tolerance limit" paper
提供机构：
figshare
创建时间：
2025-01-25
