High-Resolution Differential Topography Measurement Using Adaptive Linnik Interferometry [Dataset]

In order to validate a new sample alignment algorithm, measurements were performed by a home-built Linnik interferometer (100x, NA=0.90 and 133x, NA = 1,1). The dataset contains image stacks obtained by the Linnik interferometer. Two Measurements were carried out as an adaptive measurement where the reference object ist the same as the measurement object. The remaining measurements were carried out in a conventional manner with a plane mirror as reference. If you use the data please refer to our corresponding article mentioned below.