Processed and raw data of papers published as part of the NWO OTP project "Spatial ALD: More Materials, More Demanding Applications"

Processed and raw data of papers published as part of the NWO OTP project "Spatial ALD: More Materials, More Demanding Applications". The aim of this project was to investigate fundamental aspects of spatial ALD, such as doping and multicomponent materials, nucleation and growth effects, and conformality in 3D structures, to expand the technique to more materials and more demanding applications. The research was performed at the Eindhoven University of Technology in colaboration with several industrial partners. The data presented here is a part of the raw data and the majority of processed data presented in the three papers that have so far been published as part of this project.