Direct measurement of temperature provides during local laser annealing
收藏DataCite Commons2026-05-04 更新2026-05-11 收录
下载链接：
https://doi.esrf.fr/10.15151/ESRF-ES-2369750160
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资源简介：
The goal of this experiment is to develop an X-ray diffraction imaging approach to fast, model-free measurements of heat profiles in local laser annealing of single-crystalline substrates. This way, we aim at refining the temperature profiles to meet the requirements local, laser-enhanced epitaxy. The experiment will demonstrate this approach for semiconductor substrates and enable applications in more complex heterostructures and devices.
提供机构：
European Synchrotron Radiation Facility
创建时间：
2026-05-04
