Machine-Learning Based Inference of Critical Dimensions of Gate-All-Around Transistors from Reflectance Spectroscopy Measurements
收藏NIAID Data Ecosystem2026-05-10 收录
下载链接：
https://doi.org/10.7910/DVN/XNMAUY
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资源简介：
Wavelength-Dependent scatterometry intensity values for periodic transistor arrays.
创建时间：
2026-01-07
