Summary of scan homogenization data

Scanning homogenization data is generated: A set of host computer software is developed through LabVIEW software to control the two-dimensional movement of the beam and collect patterns at different positions, and all the collected patterns are processed and analyzed by image processing software to obtain the light field overlay map, and the line gray scale analysis of the overlay map is carried out to obtain the light intensity distribution curve.The content of the data: including schematic diagrams with spot radii of 5mm, 8mm and 15mm; When the spot radius is 5mm, the ratio of the step distance to the spot radius is 1, 1.1, 1.2, and 1.3. When the spot radius is 8mm and 15mm, the ratio of the step distance to the spot radius is 1.1, 1.2, and 1.3