Supplemental material to 'Analysing dust particle size and size distribution on extracted particles by SEM and comparing with light scattering techniques'

The presented data is supplemental material to the publication 'Analysing dust particle size and size distribution on extracted particles by SEM and comparing with light scattering techniques' (DOI: 10.1002/ppap.202400032) in Plasma Processes and Polymers published by Wiley‐VCH GmbH. The article describes six nearly identical cycles (numbered Set_1-6). In each amorphous hydrogenated carbon nanoparticles formed in a low temperature, low pressure discharge by plasma polymerization. The growth of the particles was monitored and eight consecutive samples per cycle were taken (numbered Extraction_1-8). For each sample scanning electron microscopy images of parts (Part_1-x) of the sample wafers were taken at a fixed magnification of 3000, which equals 12.4 nm per pixel. These images make up the first part . In a next step the particles were identified with the Hough transform-based routine , which is part of . The resulting data is stored in the second part . Lastly, from this analysis the particle size distribution (PSD) is modeled as a normal distribution. While in the publication a subset is presented for discussion, here the full histogram set can be accessed. It is found in