Microdefects Analysis and Development of Flexure-based Hybrid Mechanisms for Micropositioning

Long-range precision measurements of micro objects require both long travel distances and high accuracy. However, there is limited research on combining these two factors effectively. This thesis analyses microdefects and develops hybrid flexure-based mechanisms for micro-positioning. The mechanisms are tested under various conditions to ensure reliable performance. The thesis provides a practical solution for precise, long-distance positioning in fields such as manufacturing and scientific research.