Deposition rate for pulse sputtering
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资源简介:
The deposition rate for different values of discharge power as a function of pressure (orifice diameter) at constant argon flow (90 sccm) for pulsed sputtering mode
创建时间:
2025-05-19

The deposition rate for different values of discharge power as a function of pressure (orifice diameter) at constant argon flow (90 sccm) for pulsed sputtering mode