Micromechanical high-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics
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We share experimental data for Figs. 2,4,5,6,11,12,13 of arxiv manuscript arXiv:2211.12469 [physics.app-ph] entitled "Micromechanical high-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics".
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2022-12-15
