EDDIE - Energy Dispersive x-rays spectroscopy for areal Density and composItion Evaluation

EDDIE is a MATLAB code for the for the evaluation of thin lms mass thick- ness and composition based on the Energy Dispersive X-Ray Spectroscopy (EDS). The method exploits the theoretical calculation of the in-depth char- acteristic X-ray generation distribution function in multilayer sam- ples, by the numerical solution of the electron trans- port equation. Once the substrate composition in known, this method gives reliable measurements without the need of a reference sample and/or mul- tiple voltage acquisitions. The electron transport model is derived from the Boltzmann transport equation and it exploits the most updated and reli- able physical parameters in order to obtain an accurate description of the phenomenon.