Numerical datasets corresponding to process parameters, microstructural measurements, laser fluence variations, surface roughness values, I–V characteristics, and Hall mobility measurements of RB–SiC thin films discussed in the manuscript.
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Numerical datasets corresponding to process parameters, microstructural measurements, laser fluence variations, surface roughness values, I–V characteristics, and Hall mobility measurements of RB–SiC thin films discussed in the manuscript.
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2025-08-21
