Data and software underlying the publication "Laser-cut Patterned, Micrometer-thin Diamond Membranes with Coherent Color Centers for Open Microcavities"

The data and software underlying the research article "Laser-cut Patterned, Micrometer-thin Diamond Membranes with Coherent Color Centers for Open Microcavities". In this physics paper, we present a new method to pattern diamond microdevices utilizing laser cutting, followed by reactive ion etching to thin them down. We compare this fabrication method to an established method using e-beam lithography and a silicon nitride hard mask. Devices obtained from both fabrication methods are characterized by scanning cavity microscopy, showing that high cavity finesse can be reached. In addition, we perform low-temperature spectroscopy to show that the devices contain optically coherent Tin- and Nitrogen-Vacancy centers. The measurements are performed in quantum optics laboratories.The dataset contains the measured data and the Python code to analyse and reproduce the figures shown in the paper. Most measurements are conducted with the Python 3 framework Quantum Measurement Infrastructure (QMI) and the data acquisition framework Quantify. The measured data is stored in individual HDF5 files, with a unique timestamp and identifier. Analysed data is stored in HDF5 and JSON files named processed dataset or quantities of interest. The white light interferometer data is stored in text files.Please see the README.md file for instructions on how to run the Python code to reproduce the figures.

本数据集为研究论文《用于开放微腔的激光切割图案化微米级薄金刚石膜与相干色心》（Laser-cut Patterned, Micrometer-thin Diamond Membranes with Coherent Color Centers for Open Microcavities）提供了数据与软件支撑。该物理学论文提出了一种全新的金刚石微器件制备方案：先通过激光切割完成图案化加工，随后借助反应离子刻蚀实现薄膜减薄。我们将该制备工艺与已成熟的电子束光刻结合氮化硅硬掩模工艺进行了对照实验。采用扫描腔显微镜对两种工艺制备的器件进行表征，结果证实该方案可实现高品质的腔精细度。此外，我们通过低温光谱实验证明，所制备的器件中包含光学相干的锡空位与氮空位（Nitrogen-Vacancy, NV）色心。所有测量实验均在量子光学实验室中完成。本数据集包含论文中展示的全部实测数据与用于分析并复现论文图表的Python代码。大部分测量工作基于Python 3框架下的量子测量基础设施（Quantum Measurement Infrastructure, QMI）与数据采集框架Quantify开展。实测数据以独立的HDF5文件存储，每个文件均配备唯一的时间戳与标识符。经处理后的分析数据则存储于命名为"processed dataset"或"quantities of interest"的HDF5与JSON文件中。白光干涉仪数据以文本文件格式存储。如需运行Python代码复现论文中的图表，请参阅README.md文件中的操作指南。