Silicon Mechanical Sensors for High-Temperature Control Systems (1974–1991).

This study addresses the critical need for high-precision silicon mechanical sensors in industrial control systems, particularly for managing research tests of reusable LPRE units, where pressure (0–10 atm, ±1% error) and acceleration (0–10 g, 0–300 Hz, ±5% error) measurements are essential. Traditional sensors suffer from high weight, low sensitivity, and operational drift, necessitating innovative solutions for temperatures up to 300°C. Using mathematical modeling, piezoresistive effect analysis, and experimental validation, the research develops novel physical and functional models for monolithic integrated piezoresistive transducers (IPTs). Key innovations include minimizing p-n junction areas to extend the temperature range beyond 200°C, introducing bridge structures without insulating p-n junctions to enhance conductivity and reliability, and optimizing elastic element resistivity (0.5–10 Ω·cm) to reduce temperature errors. Microminiature IPTs (e.g., SIAP 408854.001 for pressure, ANPPE SIAP 402139.001 for acceleration) are developed, with results validated at scientific conferences (1983–1989), offering robust solutions for harsh environments.