Dataset for publication "On double-layer and reverse discharge creation during long positive voltage pulses in a bipolar HiPIMS discharge"

Name: Dataset for publication "On double-layer and reverse discharge creation during long positive voltage pulses in a bipolar HiPIMS discharge"
Creator: Zenodo
Published: 2024-04-04T12:17:04+08:00

Zenodo2024-12-16 更新2026-05-26 收录

等离子体放电

HiPIMS薄膜沉积

数据链接：

https://zenodo.org/doi/10.5281/zenodo.10890100 数据链接链接失效反馈

官方服务：

资源简介：

Dataset for publication "On double-layer and reverse discharge creation during long positive voltage pulses in a bipolar HiPIMS discharge", https://doi.org/10.1088/1361-6595/ad3e29.

提供机构：

Zenodo

创建时间：

2024-04-04