Simulation Dataset of Electron Beam Dynamics for Compact All-Electrostatic SEM Lenses via Parametric Sweeps

This dataset comprises high-fidelity simulation data characterizing the electron beam dynamics within a compact all-electrostatic lens system optimized for in-situ lunar scanning electron microscopy (SEM). The data was generated using COMSOL Multiphysics \uff08AC\/DC and Particle Tracing Modules\uff09 through extensive parametric sweeps. The dataset captures the coupled effects of electrode geometry and voltage configurations on electron trajectories.The raw data records the spatial coordinate parameters (particle trajectories) of electron beams at critical cross-sections. These coordinates allow for the derivation of key optical performance metrics, specifically the focal length and minimum beam spot diameter. The sampling strategy employs non-uniform step sizes to introduce randomness, ensuring robust coverage of the design space.