Dataset of manuscript

Aiming at the selectivity issue of metal oxide semiconductor (MOS) gas sensors, a new method was proposed, that is, to construct a highly selective MEMS gas sensor by utilizing boolean response characteristics. This sensor has a separated \catalytic membrane plus gas sensing membrane\ stacking structure, where the high selectivity catalytic membrane serves as the sensitive element and the high sensitivity gas sensitive membrane serves as the conversion element. Based on this, a corresponding stacked structure was constructed using acetone as a model gas, WO3 modified material as the gas sensitive membrane, and K-OMS-2 as the catalytic membrane material, and the expected performance was verified. This sensor shows excellent selectivity, anti-interference ability, and stability, and has a reliable detection ability for acetone. In comparison to the inherent defects of traditional sensors, the constructed gas sensor has high selectivity and boolean type responses. Based on the vast research field of catalysis, the sensor has excellent feasibility and unlimited flexibility, and it will become the new focus of research in the selectivity of MOS gas sensors.