Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator
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Data for [Vanackere, T., Hermans, A., Christen, I. et al. Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator. Nat Commun 16, 11637 (2025). https://doi.org/10.1038/s41467-025-66718-4]
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2025-12-30
