Monte Carlo transport of sputtered Cu in Ar in the Eisenmenger-Sittner post-magnetron geometry: dataset
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资源简介：
Raw Monte Carlo outputs, aggregated results, digitised measured angular distributions and all numbers underlying the article "Independent Monte Carlo implementation of the Eisenmenger-Sittner post-magnetron transport model for sputtered Cu" (A. Bouazza, submitted). Cu sputtered into Ar at 0.05–2 Pa; frozen baseline, diagnostics, cross-section and emission sensitivity, primary-energy sensitivity and a factorial cross-check with SPUTRA collision physics. See README.md for the file structure.
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Zenodo创建时间：
2026-09-25
