Cr-Al-O-N thin film SEM surface microstructure images
收藏DataONE2020-02-10 更新2024-06-08 收录
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https://search.dataone.org/view/sha256:af753ff7d4a019aba4e5f5f65f7748e66d71435dd1defd822841ce4fd14a7d02
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资源简介：
This dataset contains SEM surface microstructure images of Cr-Al-O-N thin films that were deposited by sputter deposition for a variation of process parameters and chemical composition. The CSV-file contains chemical composition and sputter deposition process data for the individual SEM images. The image scale is 0.538 pixels/nm. For further information view the related publication.
创建时间：
2023-11-22
