magnetron sputtering
收藏Mendeley Data2023-09-19 更新2024-06-28 收录
下载链接：
https://www.doi.org/10.57760/sciencedb.11287
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资源简介：
Based on MATLAB software and shadow masks, establish a control model for lateral thickness distribution of thin films in magnetron sputtering.
创建时间：
2023-09-19
