Rare-Earth Dopants in ALD Thin Films: Host Materials, Dopants, and Applications

This comparison synthesizes reported studies on the use of rare-earth species (R) as dopants in ALD thin films, as summarized in Table 2 of Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements https://doi.org/10.1002/admi.202400274. The data links host materials (e.g., ZnS, Al₂O₃, HfO₂, TiO₂) with their respective rare-earth dopants (e.g., Tb, Er, Eu, La, Y) and the functional applications enabled, including luminescence, waveguides, gate dielectrics, memory, electrolytes, thermometry, magnetics, and optoelectronics. By structuring this information in ORKG, the comparison allows researchers to analyze patterns of dopant usage across diverse host matrices, evaluate multifunctional roles of specific dopants such as Er and La, and trace application domains where rare-earth ALD films have shown promise.