Properties of SiC and Si3N4 Thin Films Containing Self-Assembled Gold Nanoparticles
收藏Mendeley Data2024-03-27 更新2024-06-26 收录
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The data describes the properties of SiC+Au and Si3N4Si3N4+Au thin films prepared by magnetron sputtering deposition followed by thermal annealing. The influence of gold addition on the optical and electrical properties is explored.
创建时间:
2024-01-23



