Improving the performance of Mo/Si/C multilayers through selective substrate bias-assistance
收藏DataCite Commons2025-10-24 更新2026-05-05 收录
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资源简介：
Mo/Si/C multilayers were fabricated with bias applied to different layers under the same conditions. The results demonstrate that bias significantly reduces surface and interfacial roughness, with effective improvements observed for each material.
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Science Data Bank
创建时间：
2025-10-24
