Dataset: Ben F. Spencer et al., "Characterization of buried interfaces using Ga Kα Hard X-ray Photoelectron Spectroscopy (HAXPES)"

Dataset associated with publication, Faraday Discussion (Issue: Photoelectron spectroscopy and the future of surface analysis Faraday Discussion), April 2022, "Characterization of buried interfaces using Ga Kα Hard X-ray Photoelectron Spectroscopy (HAXPES)." This work demonstrates the capability of HAXPES to obtain elemental and chemical state information below the surface for the detection of buried interfaces non destructively. This is demonstrated in some important materials systems such as semiconductor structures, memory storage materials, ion-implanted graphite, metals with oxide passivation layers, and polymer nanostructures. The data here are shared to support the scientific community working in the area of materials characterisation using similar techniques.