Data for the radio frequency sheath of plasma with Cairns–Tsallis electron velocity distribution

Cairns – Tsallis distribution is a common non Maxwell distribution, which contains two parameters, one of which represents the non extensibility of the electron, and the other represents the non thermal property of the electron. To solve this problem, a one-dimensional collisionless RF sheath program with high-energy electrons is developed. Based on the RF sheath model established by Edelberg and Aydil in 1999, the program adds the electronic distribution in the form of Cairns – Tsallis distribution, and is compiled by Compaq Visual Fortran. The structure of the RF sheath with high-energy electronic components changes with time and space. By changing the two parameters of the distribution function, The dependence of sheath structure on distribution function can be analyzed. On this basis, the ion energy hitting the material, the sheath power dissipation and the energy hitting the material surface can be calculated. The results of this program support published articles [Ou, and Men, Phys. Plasma 27, 083517 (2020);]