Data accompanying the publication: Coherent Fourier scatterometry a holistic tool for inspection of isolated particles or defects on gratings

This dataset contains simulated datasets and MATLAB scripts used to reproduce key results in the associated publication “Coherent Fourier scatterometry: a holistic tool for inspection of isolated particles or defects on gratings”. It includes simulated split-detector differential scan signals of a silicon diffraction grating (period p = 792 nm) for three scenarios: (i) no particle, (ii) a 100 nm particle on top of a grating line, and (iii) a 100 nm particle on the grating substrate. The accompanying MATLAB scripts generate the corresponding plots. The dataset is structured to support reproducibility and reuse, and may be useful for related research involving grating diffraction defect inspection simulations.