A method for precise measurement of the dispersion energy at distances below 50nm

The data were used for precise measurements of adhesion energy between contacting Si and Ru rough surfaces. Information for interpretation of the data can be found in: A. V. Postnikov, I. V. Uvarov, and V. B. Svetovoy, Measurement of the adhesion energy between Si and Au caused by dispersion forces, Phys. Rev. B 111, 085420 (2025). Folder AFM contains AFM scans in format WSxM. The files Ru_hot_# provide information on surface roughness of Ru film of 50nm thick, magnetron sputtered on Si substrate at 400° C in 3 different locations. Files Si_tip_# made on the working surface of the tip of the cantilever in 5 different locations. Folder Interferometer contains PicoScope files for the left and right edges of the cantilever above the substrate. Each file includes two interferograms: one when the laser beam is moving from the adhered end to the fixed end of the cantilever and one when the beam is moving in the opposite direction.