Low-cost high-speed fiber-coupled interferometer for precise surface profilometry [Dataset]

This dataset contains raw data obtained by a fiber-coupled laser interferometer for surface profilometry (NA = 0.38, wavelength = 1550 nm) and a dataset measured by an atomic force microscope for reference. The data obtained by the laser interferometer includes surface profiles measured from a chirp standard manufactured by the PTB (Physikalisch-Technische Bundesanstalt, Germany), a sinusoidal standard 531 from Simetrics GmbH, and height values obtained from the identical position of an aluminum mirror. These results are shown in section 3 of the article mentioned below. The data are saved in an HFD5 file format and can be used by example codes programmed using the software Python and Matlab. Furthermore, the interference signal shown in Figure 3 is in a CSV file format in the dataset. In addition, a profile obtained from the fine chirp texture of the chirp standard measured by an atomic force microscope (Nanite, Nanosurf AG) with EBD-HAR probe IP from Nanotools GmbH in non-contact mode is contained in the dataset. These data are saved in a CSV file format and can be used by example a code programmed using the software Python. IMPORTANT: In case you use the data please cite our corresponding article mentioned below.