Data for "Influence of Deposition Parameters on the Plasmonic Properties of Gold Nanoantennas Fabricated by Focused Ion Beam Lithography"

This is the dataset for the manuscript "Influence of Deposition Parameters on the Plasmonic Properties of Gold Nanoantennas Fabricated by Focused Ion Beam Lithography". Datasets were recorded by TEM, AFM and XRD. Files .emd and .dm4 contain the raw data from TEM measurements. They can be opened, for example, in Velox software (.emd files) and Digital Micrograph software (.dm4 files).Files .ras contain the raw data from XRD measurements in Rigaku XRD RAS Format.Files .gwy contain the raw data from AFM measurements. They can be opened in Gwyddion software. The original datasest .emd, .dm4, .ras and .gwy are exported to open format data as .tiff, .png, or .txt, too.