Dataset for: Post-fabrication Phase Trimming of Mach-Zehnder Interferometers by Laser Annealing of Germanium Implanted Waveguides

Dataset supports:
Chen, X. et al (2017). Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides. Paper presented at 2017 IEEE 14th International Conference on Group IV Photonics (GFP), Berlin.

We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control.