Detection Limits for SEM Image Segmentation

The dataset consists of six collections of SEM images, three trained U-net AI models, and CSV files with image quality metrics and trained AI model accuracy metrics. Each SEM image collection contains images augmented with Poisson noise and contrast.
This work was performed with funding from the CHIPS Metrology Program, part of CHIPS for America, National Institute of Standards and Technology, U.S. Department of Commerce.