Phase characteristic optimization of resonant MEMS environmental sensors (Data)
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https://zenodo.org/record/5720504
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资源简介：
Origin projects and figures used for the article "Phase characteristic optimization of resonant MEMS environmental sensors", published in the proceedings of Sensoren und Messsysteme 2018, 19. ITG/GMA-Fachtagung; 26.06.2018 to 27.06.2018; Nürnberg, Germany.
创建时间：
2021-11-23
