Phase characteristic optimization of resonant MEMS environmental sensors (Data)
收藏NIAID Data Ecosystem2026-03-13 收录
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资源简介：
Origin projects and figures used for the article "Phase characteristic optimization of resonant MEMS environmental sensors", published in the proceedings of Sensoren und Messsysteme 2018, 19. ITG/GMA-Fachtagung; 26.06.2018 to 27.06.2018; Nürnberg, Germany.
创建时间：
2021-11-23
