Photomask linewidth measurement comparison including an improved model-based through-focus measurement approach
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资源简介：
The here provided data includes the measured focus series of varrying iso and dense trench and line features on the nanoacale. The data was used for the evaluation of optical bidirectional measuremetns for all features. The results are provided in the submitted publication with the same title as above. In total, there are 20 different strucutres. The focus series data is provided in Mat-Files.
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Zenodo创建时间：
2025-10-31
