Chemicals Vapour Deposition in the Semiconductor Industry
收藏Organisation for Economic Co-operation and Development2026-02-21 收录
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https://www.oecd.org/en/publications/chemicals-vapour-deposition-in-the-semiconductor-industry_b0957a80-en.html
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This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the...
