IonRock: software for solving strain gradients of ion-implanted semiconductors by X-ray diffraction measurements and evolutionary programming

Abstract
We present a program that uses an optimization algorithm to fit rocking curves of ion-implanted semiconductors. This is an inverse problem that cannot be solved by simple methods. However, using recursion formulae for rocking curve calculations and a model of ion distribution after implantation, it is possible to fit experimental data with a general-purpose optimization method. In our case, we use a modified version of the genetic algorithm, which has been shown to be a good technique for thi...

Title of program: IonRock, version 1.0
Catalogue Id: ADTP_v1_0

Nature of problem
Strain determination on ion implanted zinc-blend structure semiconductors

Versions of this program held in the CPC repository in Mendeley Data
ADTP_v1_0; IonRock, version 1.0; 10.1016/j.cpc.2004.02.015

This program has been imported from the CPC Program Library held at Queen's University Belfast (1969-2018)