Deposition yield and enhancing factor
收藏DataCite Commons2025-06-01 更新2025-09-08 收录
下载链接:
https://figshare.com/articles/dataset/Deposition_yield_and_enhancing_factor/29097722/1
下载链接
链接失效反馈官方服务:
资源简介:
The enhancement factor Y based on mean power obtained as the ratio between deposition rate of pulse and DC power delivery. The error bars represent the standard deviation offor the 5 different pressure conditions. The deposition yield, i.e., the mass of produced nanoparticles per unit of energy (µg/Wh) for varied pressure and power, delivered by either DC or pulsed sputtering.
提供机构:
figshare
创建时间:
2025-05-19



