Dataset for Direct Chemical Lithography Writing on 2D Materials by Electron Beam Induced Chemical Reactions

The dataset contains all relevant data and figures regarding the Figure 4, S4 and S5 of manuscript "Direct Chemical Lithography Writing on 2D Materials by Electron Beam Induced Chemical Reactions".

All Figures are in tiff format and all relevant data are in csv formats. 

The data in csv format are labelled as specified in the corresping images (e.g. Figure4a.csv file corresponds to data used to plot graphs from Figure4a etc.). 

Axis labeling and units are always specified at the beginning of individual columns. If more than one curve was plotted from the csv file, the conditions can also be found at the beginning of corresponding columns.