Dataset supporting Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
收藏Mendeley Data2024-03-27 更新2024-06-28 收录
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https://researchportal.hw.ac.uk/en/datasets/f7f4f2cf-03af-43b3-ae17-af5de3f26a27
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资源简介：
Processed G2 data supporting publication: Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
创建时间：
2023-06-28
