Dataset for: Medusa 84 SiH - A novel high Selectivity Electron Beam Resist for Diamond Quantum Technologies

This dataset supplies the raw and processed data for our manuscript "Medusa 84 SiH - A novel high Selectivity Electron Beam Resist for Diamond Quantum Technologies". 

It is divided into several subfolders. 

The following folders contain the data for the Process Characterization, section 3 in the manuscript: 

- "Images" holds the scanning electron and optical microscopy images, which are shown in figure 1 of our manuscript. 

- The “Surface Profilometry” folder contains the data for the determination of the contrast curves and selectivity. 

- "Fabrication Yield" presents the data from the analysis of the optical microscopy images of all diamond nanopillars field arrays.

The measurement results on the NV centers in nanopillars are stored in the following folders, section 5 in the manuscript: 

- The folders "Spectrum" and "Lifetime" provides the data of the fluorescence spectrum and the excited state lifetime curve of a single NV within a nanopillar. 

- "XY-Scan" holds the data of the confocal microscopy xy-scan of a nanopillar field and the maximum fluorescence count rates from each nanopillar in this field. 

- "Saturation" presents the data of a saturation measurement for a single NV center within a nanopillar.

- "Spin Manipulation" holds the data of the Rabi, Ramsey and Spin-Echo measurements presented in the manuscript.