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CHIPS METIS Data Collection

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NIST Chemistry WebBook2025-10-11 更新2026-03-14 收录
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https://data.nist.gov/od/id/ark:/88434/pdr0-0002
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资源简介:
This collection portal provides finding aids for the CHIPS Metrology Exchange to Innovate for Semiconductors (METIS) digital assets including data, code, and a variety of resources. It spans multiple discipline areas: Materials Research, Metrology, Advanced Packaging, Semiconductors, Simulations, Microelectronics, and will evolve in alignment with the CHIPS Metrology program. In addition to NIST physical reference materials, these digital assets support commercial industry and partner laboratories validation of their analytical methods. The collection data is curated to promote provenance and traceability through use of standards and best practices in data driven systems.
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