Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride
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资源简介：
Data used for figures in "Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride" Anastasiia Ciers et.al Materials for Quantum Technology 4, 046301 (2024); arXiv:2410.03944 [cond-mat.mes-hall] (2024)
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2024-10-04
