Investigation of adhesion layers for the deposition of magnetostrictive CoxFe(1-x) films on ScyAl(1-y)N films for magnetoelectric MEMS sensors

For magnetoelectric film stacks, Co/Fe multilayers are deposited on piezoelectric (Sc)AlN films on Si/SiO2 substrates and subsequently annealed by rapid thermal annealing (RTA) to create a Co-Fe alloy phase. In this study, the influence of an optional adhesion layer of 5 nm Cr or Zr on the phase transformation and interlayer properties was investigated. The dataset provided contains logfiles from the RTA process, raw data of X-ray diffraction (XRD), enery dispersive X-ray spectroscopy (EDS) measurements and scanning electron microscope (SEM) images of focused ion beam (FIB) prepared cross-sections. 

Results published in:

H. Honig, H. Töpfer, P. Schaaf; Adhesion layers between piezoelectric and magnetostrictive layers in a MEMS magneto-sensor stack: Influence on the phase transformation of deposited Co/Fe multilayers to magnetostrictive CoxFe1−x phase. J. Vac. Sci. Technol. A 1 December 2024; 42 (6): 063405. https://doi.org/10.1116/6.0004071