Data related to nanosecond-laser conditioning of multilayer dielectric gratings

In this study, the integration of nanosecond laser conditioning (NLC) into different manufacturing stages of MLDG was proposed for the first time: on multilayer dielectric films (MLDFs) and final grating products to improve laser-induced damage performance. The results suggest that the remaining nodular ejection pits introduced by the two protocols exhibit a high nanosecond-laser damage resistance, which remains stable when the irradiated laser fluence is more than twice the nanosecond-laser-induced damage threshold (nanosecond-LIDT) of the unconditioned MLDGs. Furthermore, the picosecond-LIDT of the nodular ejection pit conditioned on the MLDFs was ~40 % higher than that of the nodular defects, and the loss of the grating structure surrounding the nodular defects was avoided.