Dataset: Tracking the creation of single photon emitters in aluminium nitride by implantation and annealing

Dataset consists of confocal scan maps presented in Figs 1-3, Hanbury-Brown&Twiss (HBT) interferograms presented in Fig3 and spectrograms presented in Figs 3-4. Confocal scan maps are presented as .csv files with the first row(column) representing x(y) location in micrometers; the rest of the file logs the normalized intensity at each pixel location. The files are named as Fig_i_Panel_j_ConfocalMap.csv, with i representing the figure number (1,2,3) and j representing the panel number (a,b,c,d). HBT interferograms are csv files with triple columns: first column represents time delay between channels in nanoseconds, second column represents the coincidence counts normalized to infinity level, third column represents the evaluation of the fit with the empirical three-level dynamics equation at the discrete time points. HBT_Fig3e_E1.csv is the upper part of Fig3 panel e, HBT_Fig3e_E2.csv is the lower part. Spectrograms are csv files with double columns, first column represents wavelengts in nanometers, second columns is the signal. Five files are prepared, with naming convention Spectrogram_EmitterNumber_AnnealTemperature.csv (example: Spectrogram_E1_600C.csv). Spectrograms in Fig3f can be found inside Fig4a-b, hence were not prepared an additional time.